correlative microscopy of optical microscope and scanning electron microscope SEM

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Correlative Microscopy Filter and Particle Traps PSE Operation Modes Spectra and Databases

Correlative Mikroscopy: Combination of Optical and SEM Data

Optical microscope: JOMESA HFD

Fast scan of filter/particle trap
Evaluates particle sizes and positions
Sorts into metallic, nonmetallic and fibers
User can mark particles for fast SEM-EDX analysis
Stores results into database

SEM with EDX: JOMESA PSE

Reads particle informations from database
Fast SEM-EDX analysis of selected particles
Optional: Full scan or all optical particle scan
Stores results to database

JOMESA PSE screen: shows optical and SEM image

Choosing area for EDX analysis

SEM-EDX versus LIBS:
Optical microscopes with LIBS option can analyze only particles found in optical analysis.
SEM analysis can add information about particles not seen in optical data.

SEM image can look quite different than optical image and reveal much information

Optical image	SEM image

Somtimes critical components (glass, abrasice materials) cannot be detected with optical methods

Optical image (glass fiber)	SEM image (glass fiber)

One cannot compare the particle counts of optical (HFD) and SEM (PSE) methods.
These two detection princples "see" particles different.

Material	Optical detection	SEM detection
Organic (fiber)	good	bad
Graphite	good	bad
Corundum	bad	very good
Glass	not at all	very good
Salts	bad	very good